NbN superconducting nanonetwork fabricated using porous silicon templates and high-resolution electron beam lithography
Artikel i vetenskaplig tidskrift, 2017
Superconducting NbN nanonetworks with a very small number of interconnected nanowires, with diameter of the order of 4 nm, are fabricated combining a bottom-up (use of porous silicon nanotemplates) with a top-down technique (high-resolution electron beam lithography). The method is easy to control and allows the fabrication of devices, on a robust support, with electrical properties close to a one-dimensional superconductor that can be used fruitfully for novel applications.
one-dimensional superconductivity
quantum phase slips
porous silicon
electron beam lithography
Författare
M. Salvato
Universita degli Studi di Roma Tor Vergata
Universita degli Studi di Salerno
Reza Baghdadi
Chalmers, Mikroteknologi och nanovetenskap, Kvantkomponentfysik
C. Cirillo
Universita degli Studi di Salerno
S. L. Prischepa
National Research Nuclear University
Belarusian State University of Informatics and Radioelectronics
A. L. Dolgiy
Belarusian State University of Informatics and Radioelectronics
V. P. Bondarenko
Belarusian State University of Informatics and Radioelectronics
Floriana Lombardi
Chalmers, Mikroteknologi och nanovetenskap, Kvantkomponentfysik
C. Attanasio
Universita degli Studi di Salerno
Nanotechnology
0957-4484 (ISSN) 1361-6528 (eISSN)
Vol. 28 46 465301Ämneskategorier
Den kondenserade materiens fysik
DOI
10.1088/1361-6528/aa8479