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Electrically tunable bulk acoustic filters with induced piezoelectric effect in BSTO film

Pavel Turalchuk ; Irina Vendik ; Orest Vendik ; John Berge (Institutionen för mikroteknologi och nanovetenskap, Fysikalisk elektronik)
38th European Microwave Conference, EuMC 2008; Amsterdam; Netherlands; 27 October 2008 through 31 October 2008 p. 1695-1698. (2008)
[Konferensbidrag, refereegranskat]

In this paper we discuss a potential realizability of a tunable bulk acoustic filter based on BSTO film for microwave applications. The estimation of characteristics of the tunable TFBAR was done by processing the experimental data obtained for the BSTO resonator using the model of the induced piezoelectric effect. The third-order tunable TFBAR filter was designed. The necessary set of the acoustic and electric parameters of the tunable ferroelectric based TFBAR was proclaimed. The 10% tunability of the TFBAR filter pass band was estimated by a simulation. The simulated characteristics were obtained taking into consideration a real structure of the BSTO based resonators (electrodes and acoustic mirror).



Denna post skapades 2009-03-25. Senast ändrad 2017-11-30.
CPL Pubid: 91877

 

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Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Fysikalisk elektronik (2007-2010)

Ämnesområden

Funktionella material

Chalmers infrastruktur