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Electrostatic feedback for MEMS sensor for in situ TEM instrumentation

Alexandra Nafari (Institutionen för mikroteknologi och nanovetenskap, Bionanosystem) ; Ning Chang ; Johan Angenete ; Krister Svensson ; Peter Enoksson (Institutionen för mikroteknologi och nanovetenskap, Bionanosystem)
Eurosensors 2008 (2008)
[Konferensbidrag, refereegranskat]

A capacitive force sensor for in situ TEM instrumentation is investigated. In order to prevent movement of the suspended plate in the capacitive sensor force feedback has been investigated, primarily using CV measurements. A manual feedback has successfully been implemented and an analytical model using a serial and a parallel capacitor is presented.

Nyckelord: Electrostatic force modeling, Force feedback, Force sensor



Denna post skapades 2008-11-18.
CPL Pubid: 78311

 

Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Bionanosystem (2007-2015)

Ämnesområden

Halvledarfysik

Chalmers infrastruktur