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MEMS sensor for in situ TEM Atomic Force Microscopy

Alexandra Nafari (Institutionen för mikroteknologi och nanovetenskap, Bionanosystem) ; David Karlén (Institutionen för mikroteknologi och nanovetenskap) ; Cristina Rusu ; Krister Svensson ; Håkan Olin ; Peter Enoksson (Institutionen för mikroteknologi och nanovetenskap, Bionanosystem)
IEEE 20th International Conference on Micro Electro Mechanical Systems, 2007. MEMS (1084-6999). p. 103-106. (2007)
[Konferensbidrag, refereegranskat]

Abstract Here we present a MEMS atomic force microscope (AFM) sensor for use inside a transmission electron microscope (TEM). This enables direct in situ TEM force measurements in the nN range. The main design challenges of the sensor are a high sensitivity and the narrow dimensions of the pole gap inside the TEM. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We present in situ TEM force measurements on nanotubes, which demonstrates the ability to measure spring constants of nanoscale systems.

Nyckelord: Atomic Force Microscopy (AFM), in situ, Transmission Electron Microscope (TEM), MEMS



Denna post skapades 2008-11-18. Senast ändrad 2010-09-07.
CPL Pubid: 78310

 

Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Bionanosystem (2007-2015)
Institutionen för mikroteknologi och nanovetenskap

Ämnesområden

Halvledarfysik

Chalmers infrastruktur