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MEMS Sensor for In Situ TEM Atomic Force Microscopy

Alexandra Nafari (Institutionen för mikroteknologi och nanovetenskap, Bionanosystem) ; David Karlén (Institutionen för mikroteknologi och nanovetenskap, Bionanosystem) ; Cristina Rusu ; Krister Svensson ; Håkan Olin ; Peter Enoksson (Institutionen för mikroteknologi och nanovetenskap, Bionanosystem)
Journal of Microelectromechanical Systems (1057-7157 ). Vol. 17 (2008), 2, p. 328 - 333 .
[Artikel, refereegranskad vetenskaplig]

Here, we present a MEMS atomic force microscope sensor for use inside a transmission electron microscope (TEM). This enables direct in situ TEM force measurements in the nanonewton range and thus mechanical characterization of nanosized structures. The main design challenges of the system and sensor are to reach a high sensitivity and to make a compact design that allows the sensor to be fitted in the narrow dimensions of the pole gap inside the TEM. In order to miniaturize the sensing device, an integrated detection with piezoresistive elements arranged in a full Wheatstone bridge was used. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We also present in situ TEM force measurements on nanotubes, which demonstrate the ability to measure spring constants of nanoscale systems.

Nyckelord: AFM, force measurements, Transmission electron microscope (TEM), MEMS, nano wire characterization



Denna post skapades 2008-11-18. Senast ändrad 2016-08-19.
CPL Pubid: 78307

 

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Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Bionanosystem (2007-2015)

Ämnesområden

Halvledarfysik

Chalmers infrastruktur

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