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Resonance technique for accurate on-wafer characterization of ferroelectric varactors

Anatoli Deleniv (Institutionen för mikroteknologi och nanovetenskap, Fysikalisk elektronik) ; Spartak Gevorgian (Institutionen för mikroteknologi och nanovetenskap, Fysikalisk elektronik) ; Vladimir Sherman ; T. Yamada ; Nava Setter
IEEE MTT-S International Microwave Symposium Digest (0149-645X). Vol. 3 (2007), p. 2063-2066.
[Konferensbidrag, refereegranskat]

A resonance technique for on-wafer characterization of ferroelectric varactors at microwave frequencies is proposed and experimentally verified. The approach is targeted on accurate assessment of the varactors losses if traditional approaches using planar transmission lines can not be used. A number of varactors based on 0.55um thick BSTO film are measured using the proposed approach and results are compared to those obtained with the broadband reflection type measurement. It is demonstrated that the resonance technique is more accurate and reliable.

Nyckelord: Ferroelectric varactors, resonators, microwave frequencies



Denna post skapades 2007-12-04.
CPL Pubid: 62433

 

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Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Fysikalisk elektronik (2007-2010)

Ämnesområden

Elektroteknik

Chalmers infrastruktur