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Design and capabilities of a cluster implantation and deposition apparatus: First results on hillock formation under energetic cluster ion bombardment

Vladimir Popok (Institutionen för experimentell fysik, Atomfysik) ; Syargey Prasalovich (Institutionen för experimentell fysik, Atomfysik) ; Mattias Samuelsson (Institutionen för experimentell fysik, Atomfysik) ; Eleanor E.B. Campbell (Institutionen för experimentell fysik, Atomfysik)
Review of Scientific Instruments Vol. 73 (2002), 12, p. 4283-4287.
[Artikel, refereegranskad vetenskaplig]

A description, advantages, and capabilities of a cluster implantation and deposition apparatus supplied by a pulsed cluster source from gaseous precursors are presented. A number of possible in situ and ex situ experimental methods to study cluster–surface collisions and modified substrate surfaces are discussed. Test experiments on cluster production show formation of Ar, N2, and O2 clusters with size up to 150 atoms for Ar and 60–70 molecules for the other gases. The possibility of cluster mass selection and acceleration up to 25 keV is reported. Nanosize hillock formation was found as a result of cluster–surface collisions with pyrolytic graphite and indium–tin–oxide. It is suggested that the hillocks' parameters such as size and density per surface area can be controlled by varying the implantation parameters and substrate material and thus provide a promising technique for nanoscale surface modification.

Nyckelord: ultra-high vacuum, cluster implantation apparatus, clusters ion beams, cluster implantation, hillocks

Denna post skapades 2006-08-28.
CPL Pubid: 283


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Institutioner (Chalmers)

Institutionen för experimentell fysik, Atomfysik (1997-2005)



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