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An easy-to-implement method for evaluation of capacitive resonant sensors

Farzan Alavian Ghavanini (Institutionen för mikroteknologi och nanovetenskap, Fasta tillståndets elektronik) ; Rödjegård Henrik ; Peter Enoksson (Institutionen för mikroteknologi och nanovetenskap, Fasta tillståndets elektronik)
Journal of Micromechanics and Microengineering (0960-1317). Vol. 16 (2006), 6, p. s156-s160.
[Artikel, refereegranskad vetenskaplig]

A novel method that can be used to characterize resonant capacitive sensors is presented. The method is based on measurement of the third harmonic of the current through the capacitor; thus the detection signal is frequency separated from the excitation signal. The measurement is time-continuousand only requires a very simple resonant structure where a single electrode is simultaneously used for excitation and detection. The readout circuit is easily implemented with a single operational amplifier and standard equipment such as a lock-in amplifier or a function generator and a spectrum analyzer. Measurements of a resonant structure confirm the feasibility of the concept.

Denna post skapades 2007-01-17.
CPL Pubid: 25849


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Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Fasta tillståndets elektronik (2003-2006)


Övrig teknisk fysik

Chalmers infrastruktur

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