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NbN superconducting nanonetwork fabricated using porous silicon templates and high-resolution electron beam lithography

M. Salvato ; Reza Baghdadi (Institutionen för mikroteknologi och nanovetenskap, Kvantkomponentfysik) ; C. Cirillo ; S. L. Prischepa ; A. L. Dolgiy ; V. P. Bondarenko ; Floriana Lombardi (Institutionen för mikroteknologi och nanovetenskap, Kvantkomponentfysik) ; C. Attanasio
Nanotechnology (0957-4484). Vol. 28 (2017), 46,
[Artikel, refereegranskad vetenskaplig]

Superconducting NbN nanonetworks with a very small number of interconnected nanowires, with diameter of the order of 4 nm, are fabricated combining a bottom-up (use of porous silicon nanotemplates) with a top-down technique (high-resolution electron beam lithography). The method is easy to control and allows the fabrication of devices, on a robust support, with electrical properties close to a one-dimensional superconductor that can be used fruitfully for novel applications.

Nyckelord: porous silicon, electron beam lithography, one-dimensional superconductivity, quantum phase slips

Denna post skapades 2017-11-08.
CPL Pubid: 253011


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