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An overview of carbon nanotubes based interconnects for microelectronic packaging

S. Chen ; B. Shan ; Y. Yang ; G. Yuan ; S. Huang ; X. Lu ; Y. Zhang ; Y. Fu ; L. Ye ; Johan Liu (Institutionen för mikroteknologi och nanovetenskap, Elektronikmaterial och system )
2017 IMAPS Nordic Conference on Microelectronics Packaging, NordPac 2017, Goteborg, Sweden, 18-20 June 2017 p. 113-119. (2017)
[Konferensbidrag, refereegranskat]

Owing to the great demand in more functions and miniaturization in microelectronic packaging, the dimensions of interconnects has decreased extremely, which has resulted in electrical, thermal, and mechanical reliability issues. To address these issues, carbon nanotube (CNT) has been selected as a promising alternative material for the interconnects in packaging due to its large current density, high thermal conductivity, great flexibility, and low coefficient of thermal expansion (CTE). In this paper, the development of CNTs based vertical interconnects was reviewed. However, the resistivity of CNTs based interconnects was much higher than that of copper interconnects. Thus, this review focused on the resistivity of CNTs-based interconnects in different fabrication process and pointed out what improves the resistivity. In the future, CNTs-Cu nanocomposite with unique properties could be the suitable material for bumps to reduce the resistivity of CNTs based bumps further.

Nyckelord: CNTs based bumps, CNTs based TSVs, CNTs-Cu nanocomposite, Interconnect, resistivity

Denna post skapades 2017-09-19.
CPL Pubid: 251966


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