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XPS Study of Multilayer Multicomponent Films

Alexander Lubenchenko ; Alexander Batrakov ; Alexey Pavolotsky (Institutionen för rymd-, geo- och miljövetenskap, Onsala rymdobservatorium, Avancerad mottagarutveckling) ; Olga Lubenchenko ; Dmitriy Ivanov
Applied Surface Science (0169-4332). Vol. 427 (2018), A, p. 711-721.
[Artikel, refereegranskad vetenskaplig]

In the paper, we propose an XPS-based quantitative method for depth profile analysis of chemical and phase composition of multi-component and multi-layer samples. The method includes: (1) new method for background subtraction accounting for depth non-uniformity of electron energy losses; (2) new method for photoelectron line decomposition into elementary peaks, which accounts for physical nature of the decomposition parameters; (3) joint solving of both background subtraction and photoelectron line decomposition problems; (4) criterion for assessing of line decomposition accuracy; (5) simple formula for layer thickness extraction for multi-element and multi-layer sample. We apply the developed method for analysis of multilayer niobium oxide and sub-oxide films before and in course of ion milling.

Nyckelord: XPS, Chemical and phase analysis, Depth profiling, XPS background subtracting, XPS line decomposition, Niobium oxide



Denna post skapades 2017-08-25. Senast ändrad 2017-08-25.
CPL Pubid: 251424

 

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