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Rapid manufacturing of OSTE polymer RF-MEMS components

Sofia Rahiminejad (Institutionen för mikroteknologi och nanovetenskap, Elektronikmaterial och system ) ; J. Hansson ; Elof Köhler (Institutionen för mikroteknologi och nanovetenskap, Elektronikmaterial och system ) ; W. van der Wijngaart ; T. Haraldsson ; Haasl Sjoerd (Institutionen för mikroteknologi och nanovetenskap, Elektronikmaterial och system ) ; Peter Enoksson (Institutionen för mikroteknologi och nanovetenskap, Elektronikmaterial och system )
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (10846999). (2017)
[Konferensbidrag, övrigt]

This paper reports the first RF-MEMS component in OSTE polymer. Three OSTE-based ridge gap resonators were fabricated by direct, high aspect ratio, photostructuring. The OSTE polymer's good adhesion to gold makes it suitable for RF-MEMS applications. The OSTE ridge gap resonators differ in how they were coated with gold. The OSTE-based devices are compared to each other as well as to Si-based, SU8-based, and CNT-based devices of equal design. The OSTE-based process was performed outside the cleanroom, and with a fast fabrication process (∼1 h). The OSTE-based device performance is on par with that of the other alternatives in terms of frequency, attenuation, and Q-factor. © 2017 IEEE.



Denna post skapades 2017-05-12.
CPL Pubid: 249293

 

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