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COMSOL modeling of SAW Resonators

Ventsislav Yantchev (Institutionen för kemi och kemiteknik, Fysikalisk kemi) ; P. Turner ; V. Plessky
2016 IEEE International Ultrasonics Symposium, IUS 2016; Tours; France; 18-21 September 2016 (1948-5719). Vol. 2016-November (2016), p. Art no 7728546.
[Konferensbidrag, refereegranskat]

Here we demonstrate some generic 2D and 3D routines for SAW analysis employing the commercial COMSOL Multiphysics platform for finite element analysis (FEA). More specifically, we consider the analysis and optimization of high performance LSAW resonators for RF filters. The LSAW nature - being well studied and sufficiently complicated - is chosen as a suitable example for analysis and the results are compared to state-of-the-art knowledge. We found very good agreement between the results of the analytical scheme proposed here and the state-of-art findings. Finally, we demonstrate a TC-SAW piston-mode device simulated using SiO2/128 degrees Y-X LiNbO3.

Nyckelord: SAW, Resonators, Simulations, FEA

Denna post skapades 2017-01-13. Senast ändrad 2017-03-16.
CPL Pubid: 246895


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Institutioner (Chalmers)

Institutionen för kemi och kemiteknik, Fysikalisk kemi


Elektroteknik och elektronik

Chalmers infrastruktur