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Thermal conductivity measurement of densified carbon nanotube bundles by pulsed photothermal reflectance technique

Majid Kabiri Samani (Institutionen för mikroteknologi och nanovetenskap, Elektronikmaterial och system ) ; Shuangxi Sun (Institutionen för mikroteknologi och nanovetenskap, Elektronikmaterial och system ) ; Yifeng Fu (Institutionen för mikroteknologi och nanovetenskap, Elektronikmaterial och system ) ; Per Rudquist (Institutionen för mikroteknologi och nanovetenskap, Elektronikmaterial och system ) ; Johan Liu (Institutionen för mikroteknologi och nanovetenskap, Elektronikmaterial och system )
IMAPS Nordic Annual Conference 2016 Proceedings (2016)
[Konferensbidrag, refereegranskat]

Carbon nanotubes (CNTs) were proposed as a promising interconnection material in future miniaturized electronics, owing to their exceptional electrical and thermal properties. A series of CNT bundles with 1 mm diameter were grown on silicon substrate by thermal Chemical Vapor Deposition (CVD) at temperature 700 oC. The as grown CNT bundles were densified by a vapor densification method. SEM analysis shows that the vapor densification is densified the CNT forests, which reduces the air volume fraction to increase thermal conductivity of the CNT bundles. The pulsed photothermal reflectance technique is applied to measure thermal conductivity of the CNT bundle before and after densification and the results show the thermal conductivity of densified CNT bundles increases and capability of making CNT filled through silicon via with better thermal and electrical performance.

Nyckelord: Carbon nanotube, Densification, Plused photothermal reflectance, Thermal conductivity



Denna post skapades 2016-12-19.
CPL Pubid: 246291

 

Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Elektronikmaterial och system

Ämnesområden

Nanoteknik

Chalmers infrastruktur