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A miniaturized optical gas-composition sensor with integrated sample chamber

N. Pelin Ayerden ; Mohammadamir Ghaderi ; Peter Enoksson (Institutionen för mikroteknologi och nanovetenskap, Elektronikmaterial och system ) ; Ger de Graaf ; Reinoud F. Wolffenbuttel
Sensors and actuators. B, Chemical (0925-4005). Vol. 236 (2016), 29, p. 917–925.
[Artikel, refereegranskad vetenskaplig]

A robust and highly miniaturized optical gas sensor based on optical absorption spectroscopy is presented. By using the resonator cavity of a linear variable optical filter (LVOF) also as a gas chamber, a compact and robust optical sensor is achieved. The device operates at the 15th order in 3.2–3.4 μm wavelength range for distinguishing hydrocarbons. The physical cavity length at the μm-level is translated into an effective optical absorption path length at the mm-level by the use of highly reflective (R > 98%) Bragg mirrors. The optical design using the Fizeau interferometer approach is described. Moreover, the CMOS-compatible fabrication method is explained. In addition to the wideband and single wavelength filter characterization, absorption of methane in the LVOF cavity is demonstrated at 3392 nm and 3416.60 nm wavelengths.

Nyckelord: Gas sensor; Methane; Mid-IR; Fabry-Perot interferometer; Fizeau interferometer; Linear variable optical filter



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Denna post skapades 2016-11-02. Senast ändrad 2016-11-02.
CPL Pubid: 244625