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Self-organized nanostructuring in Zr0.69Al0.31N thin films studied by atom probe tomography

L. J S Johnson ; N. Ghafoor ; D. Engberg ; Mattias Thuvander (Institutionen för fysik, Materialens mikrostruktur (Chalmers)) ; Krystyna Stiller (Institutionen för fysik, Materialens mikrostruktur (Chalmers)) ; M. Odén ; L. Hultman
Thin Solid Films (0040-6090). Vol. 615 (2016), p. 233-238.
[Artikel, refereegranskad vetenskaplig]

We have applied atom probe tomography (APT) to analyze self-organizing structures of wear-resistant Zr0.69Al0.31N thin films grown by magnetron sputtering. Transmission electron microscopy shows that these films grow as a three-dimensional nanocomposite, consisting of interleaved lamellae in a labyrinthine structure, with an in-plane size scale of ~ 5 nm. The structure was recovered in the Al APT signal, while the Zr and N data lacked structural information. The onset of the self-organized labyrinthine growth was observed to occur by surface nucleation, 5–8 nm above the MgO substrate, due to increasing Zr–Al compositional fluctuations during elemental segregation. At a final stage, the labyrinthine growth mode was observed to be interrupted by the formation of larger ZrN grains.

Nyckelord: Atom probe tomography; Hard coatings; Magnetron sputtering; Nanostructures; Self-organized structures; Zirconium aluminum nitride

Denna post skapades 2016-08-31. Senast ändrad 2017-02-28.
CPL Pubid: 241029


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Institutionen för fysik, Materialens mikrostruktur (Chalmers)


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