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An APT investigation of an amorphous Cr-B-C thin film

Torben Boll (Institutionen för teknisk fysik, Materialens mikrostruktur ) ; Mattias Thuvander (Institutionen för teknisk fysik, Materialens mikrostruktur ) ; Sabrina Koch (Institutionen för teknisk fysik, Materialens mikrostruktur ) ; J. N. Wagner ; N. Nedfors ; U. Jansson ; Krystyna Stiller (Institutionen för teknisk fysik, Materialens mikrostruktur )
Ultramicroscopy (0304-3991). Vol. 159 (2015), p. 217-222.
[Artikel, refereegranskad vetenskaplig]

A magnetron sputtered amorphous Cr-B-C thin film was investigated by means of atom probe tomography (APT). The film is constituted of two phases; a Cr-rich phase present as a few nanometer large regions embedded in a Cr-poor phase (tissue phase). The Cr-rich regions form columnar chains oriented parallel to the growth direction of the film. It was found that the Cr-rich regions have a higher B:C ratio than the Cr-poor regions. The composition of the phases was determined as approximately 35Cr-33B-30C and 15Cr-40B-42C (at%), respectively. The results suggest that this type of nanocomposite films has a more complex structure than previously anticipated, which may have an importance for the mechanical and electrical properties.

Nyckelord: Atom probe tomography, Thin film, Boride, Cr-B-C, Nanocomposite, Carbon, Metall carbo-boride



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Denna post skapades 2016-01-14.
CPL Pubid: 230667

 

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Institutioner (Chalmers)

Institutionen för teknisk fysik, Materialens mikrostruktur (2012-2015)

Ämnesområden

Nanovetenskap och nanoteknik
Fysik

Chalmers infrastruktur