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Linear and nonlinear characterization of low-stress high-confinement silicon-rich nitride waveguides

Clemens Krückel (Institutionen för mikroteknologi och nanovetenskap, Fotonik) ; Attila Fülöp (Institutionen för mikroteknologi och nanovetenskap, Fotonik) ; Thomas Klintberg ; Jörgen Bengtsson (Institutionen för mikroteknologi och nanovetenskap, Fotonik) ; Peter Andrekson (Institutionen för mikroteknologi och nanovetenskap, Fotonik) ; Victor Torres Company (Institutionen för mikroteknologi och nanovetenskap, Fotonik)
Optics Express (1094-4087). Vol. 23 (2015), 20, p. 25827-25837.
[Artikel, refereegranskad vetenskaplig]

In this paper we introduce a low-stress silicon enriched nitride platform that has potential for nonlinear and highly integrated optics. The manufacturing process of this platform is CMOS compatible and the increased silicon content allows tensile stress reduction and crack free layer growth of 700 nm. Additional benefits of the silicon enriched nitride is a measured nonlinear Kerr coefficient n2 of 1.4*10^18 m2/W (5 times higher than stoichiometric silicon nitride) and a refractive index of 2.1 at 1550 nm that enables high optical field confinement allowing high intensity nonlinear optics and light guidance even with small bending radii. We analyze the waveguide loss (~1 dB/cm) in a spectrally resolved fashion and include scattering loss simulations based on waveguide surface roughness measurements. Detailed simulations show the possibility for fine dispersion and nonlinear engineering. In nonlinear experiments we present continuouswave wavelength conversion and demonstrate that the material does not show nonlinear absorption effects. Finally, we demonstrate microfabrication of resonators with high Q-factors (~10^5).

Nyckelord: Integrated optics devices, Wavelength conversion devices, Semiconductor materials, Nonlinear optics - four-wave mixing, Nanostructure fabrication, Resonators

Denna post skapades 2015-11-16. Senast ändrad 2016-07-07.
CPL Pubid: 225822


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Denna publikation är ett resultat av följande projekt:

Phase-sensitive optical parametric amplifiers (PSOPA) (EC/FP7/291618)