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MICORMACHINED MULTILAYER SU8 DOUBLE-SIDED PIN-FLANGE ADAPTER FOR 220-325 GHZ

Sofia Rahiminejad (Institutionen för mikroteknologi och nanovetenskap, Bionanosystem) ; Elena Pucci (Institutionen för signaler och system, Antenner) ; Sjoerd Haasl ; Peter Enoksson (Institutionen för mikroteknologi och nanovetenskap, Bionanosystem)
25th Micromechanics and Microsystems Europe Workshop, MME 2014, Istanbul, Turkey, August 31 - September 3, 2014 (2014)
[Konferensbidrag, refereegranskat]

We present the first double-sided pin-flange adapter for 220 􀀀 325 GHz solely made out of gold covered multilayered SU8. The process is based on exposing layers with different patterns realizing openings through both layers and pin structures in only one of the layers. Each process gives two layers which are then bonded back to back resulting in a four layer device. SU8 has the benefit of being cheap and robust compared to Si and is useful for applications where the device will be handled by hand and could be exposed to uneven forces. The multilayer SU8 double-sided pin-flange adapter was successfully fabricated. Measurements and evaluations will be presented at the conference.



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Denna post skapades 2015-10-12.
CPL Pubid: 224059

 

Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Bionanosystem (2007-2015)
Institutionen för signaler och system, Antenner (2005-2014)

Ämnesområden

Materialvetenskap
Produktion
Nanoteknik

Chalmers infrastruktur