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Kinetic inductance as a microwave circuit design variable by multilayer fabrication

Astghik Adamyan (Institutionen för mikroteknologi och nanovetenskap, Kvantkomponentfysik) ; S.E. De Graaf ; Sergey Kubatkin (Institutionen för mikroteknologi och nanovetenskap, Kvantkomponentfysik) ; Andrey Danilov (Institutionen för mikroteknologi och nanovetenskap, Kvantkomponentfysik)
Superconductor Science and Technology (0953-2048). Vol. 28 (2015), 8,
[Artikel, refereegranskad vetenskaplig]

We report on the development of a reliable NbN/Al/Nb/NbN multilayer fabrication technique for combining design elements with and without kinetic inductance in superconducting microwave circuits. As a proof-of-concept we demonstrate the application of the proposed technique to build a slow microwave propagation line matched to 50 Ω terminals. Fabrication details along with the design and measurements are discussed. At 8 GHz the presented device operates as a dc controllable full-turn phase shifter. We suggest that by exploiting the kinetic inductance as a design variable one can greatly improve operation parameters for a variety of standard microwave designs such as step-impedance filters and resonators.

Nyckelord: kinetic inductance , microfabrication , microwave engineering , superconducting circuit

Denna post skapades 2015-07-27. Senast ändrad 2016-06-27.
CPL Pubid: 219992


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Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Kvantkomponentfysik


Atom- och molekylfysik och optik

Chalmers infrastruktur

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