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Loss balance in tunable ferroelectric FBARs

Spartak Gevorgian (Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik ) ; Andrei Vorobiev (Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik )
43rd European Microwave Conference, EuMC 2013 - Held as Part of the 16th European Microwave Week, EuMW 2013, Nuremberg, Germany, 7-10 October 2013 p. 1343-1346. (2013)
[Konferensbidrag, refereegranskat]

Distinguishing between different loss mechanisms and their distribution between different parts of the Film Bulk Acoustic Wave Resonators (FBAR) is an issue. In this work a scaling rule (based on the analysis of the loss mechanisms) is proposed for initial specification of the losses in different structural components of the tunable FBARs. Simple ADS based calibration procedure is then applied allowing for correction of these losses and identifying the lossiest component. It is shown, in the provided example that the losses due to scattering at the roughness of the top Al electrode is dominating. Polishing of Al is proposed as a possible way of scattering losses reduction.

Nyckelord: ferroelectric, loss acoustic, Q-factor, scattering loss, tunable FBAR



Denna post skapades 2015-05-07.
CPL Pubid: 216714

 

Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik

Ämnesområden

Elektronik

Chalmers infrastruktur