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Micro-electromechanical arrangement

Arne Alping ; Spartak Gevorgian (Institutionen för mikroelektronik och nanovetenskap)

The present invention refers to a variable capacitor comprising a first conductive layer, a second conductive layer and a semiconductor layer, the first and second layers being arranged to be displaced relative to each other under the influence of an electrostatically generated force. The semiconductor layer constitutes a voltage generator, which when exposed to a radiation produces a voltage for charging the first and second conductive layers and induces the electrostatically generated force

Denna post skapades 2015-02-20.
CPL Pubid: 212919


Institutioner (Chalmers)

Institutionen för mikroelektronik och nanovetenskap (1900-2003)


Elektroteknik och elektronik

Chalmers infrastruktur