CPL - Chalmers Publication Library
| Utbildning | Forskning | Styrkeområden | Om Chalmers | In English In English Ej inloggad.

Component for electromagnetic waves and a method for manufacturing the same

Leif Bergstedt ; Spartak Gevorgian (Institutionen för mikroteknologi och nanovetenskap, Mikrovågselektronik) ; Marica Gustafsson

The present invention relates to a method for fabricating a cavity in substrate for a component for electromagnetic waves, the method comprising providing said cavity by removal of material from said substrate by removal of material by immersing the substrate in a liquid bath of a chemical etchant, so that resultant cavity has a top and a bottom side and sidewalls, and said cavity at one of said top and/or bottom sides exhibits an at least a four sided opening having an opening with at least two different adjacent angles. The invention also relates to the component for microwave applications.

Denna post skapades 2015-02-19. Senast ändrad 2015-03-01.
CPL Pubid: 212849


Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Mikrovågselektronik


Elektroteknik och elektronik

Chalmers infrastruktur