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SU8 ridge-gap waveguide resonator

Sofia Rahiminejad (Institutionen för mikroteknologi och nanovetenskap, Bionanosystem) ; Elena Pucci (Institutionen för signaler och system, Antenner) ; S. Haasl ; Peter Enoksson (Institutionen för mikroteknologi och nanovetenskap, Bionanosystem)
International Journal of Microwave and Wireless Technologies (1759-0787). Vol. 6 (2014), 5, p. 459-465.
[Artikel, refereegranskad vetenskaplig]

In this paper, we present the first ridge-gap waveguide resonator made with a polymer base. It is designed for the frequency range 220-325 GHz, and is fabricated solely using a Au coated two-layer SU8-based process. The design is based on previous work done with Si. The new process has advantages such as fewer and cheaper process steps. The SU8 ridge-gap waveguide resonator is made in order to obtain attenuation characteristics via the measured Q-factor of the resonator. The ridge-gap waveguide resonator has the same dimensions as the previous one fabricated in Si, and the same thickness of the Au coating. The SU8-based resonator shows an attenuation loss of 0.41 dB/mm at 282.2 GHz compared to the Si-based resonator with an attenuation loss of 0.043 dB/mm at 283.5 GHz. This makes the SU8 process a more cost-effective alternative to the Si process

Nyckelord: RF-MEMS and MOEMS, New and emerging technologies and materials

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Denna post skapades 2015-01-16. Senast ändrad 2016-07-25.
CPL Pubid: 210875


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Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Bionanosystem (2007-2015)
Institutionen för signaler och system, Antenner (2005-2014)


Informations- och kommunikationsteknik
Elektroteknik och elektronik

Chalmers infrastruktur

NFL/Myfab (Nanofabrication Laboratory)

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