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Intrinsically tunable bulk acoustic wave resonators based on sol-gel grown PMN-PT films

Andrei Vorobiev (Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik ) ; Matjaz Spreitzer ; Asja Veber ; Danilo Suvorov ; Spartak Gevorgian (Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik )
Journal of Applied Physics (0021-8979). Vol. 116 (2014), 6, p. Art. no. 064101.
[Artikel, refereegranskad vetenskaplig]

Intrinsically tunable bulk acoustic wave resonators, based on sol-gel 0.70Pb(Mg1/3Nb2/3)O3- 0.30PbTiO3 (PMN-PT) thin films, with high effective electromechanical coupling coefficient of 13% and tunability of the series resonance frequency up to 4.0% are fabricated and characterized. The enhanced electroacoustic properties of the PMN-PT resonators are attributed to the mechanism of polarization rotation occurring in the region of the morphotropic phase boundary. Electroacoustic performance of the PMN-PT resonators is analyzed using the theory of dc fieldinduced piezoelectric effect in ferroelectrics. Extrinsic acoustic loss in the PMN-PT resonators is analyzed using the model of the wave scattering at reflections from rough interfaces. Mechanical Q-factor of the resonators is up to 70 at 4.1 GHz and limited mainly by losses in the PMN-PT film.

Nyckelord: intrinsically tunable film bulk acoustic wave (BAW) resonators; ferroelectrics; 0.70Pb(Mg1/3Nb2/3)O3-0.30PbTiO3 (PMN-PT) thin films; sol-gel technique; morphotropic phase boundary; film microstructure; dc field induced piezoelectric effect; effective electromechanical coupling coefficient; tunability of resonance frequency; quality factor; roughness induced attenuation of acoustic waves.



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Denna post skapades 2014-08-14. Senast ändrad 2015-03-10.
CPL Pubid: 201392

 

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