CPL - Chalmers Publication Library
| Utbildning | Forskning | Styrkeområden | Om Chalmers | In English In English Ej inloggad.

Impact of the electrode material and shape on performance of intrinsically tunable ferroelectric FBARs

Andrei Vorobiev (Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik ) ; Spartak Gevorgian (Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik )
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (0885-3010). Vol. 61 (2014), 5, p. 840-848.
[Artikel, refereegranskad vetenskaplig]

Experiment-based analysis of losses in tunable ferroelectric xBiFeO 3-(1-x)BaTiO3 (BF-BT) film bulk acoustic wave resonators (FBARs) is reported. The Q-factors, effective coupling coefficients, and tunabilities are considered as functions of surface roughness of the ferroelectric film, the acoustic impedance and shape of the electrodes/ interconnecting strips, leakage of acoustic waves into the substrate via Bragg reflector, and the relative thicknesses of the electrodes and ferroelectric film. Compared with Al, the high acoustic impedance of Pt electrodes provides higher Q-factor, coupling coefficient, and tunability. However, using Pt in the interconnecting strips results in reduction of the Q-factor.



Denna post skapades 2014-06-19. Senast ändrad 2014-09-02.
CPL Pubid: 199409

 

Läs direkt!


Länk till annan sajt (kan kräva inloggning)




Projekt

Denna publikation är ett resultat av följande projekt:


Switchable and tunable composite film bulk acoustic wave resonators (CompFBAR) (VR//2011-4203)