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Loss balance in tunable ferroelectric FBARs

Spartak Gevorgian (Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik ) ; Andrei Vorobiev (Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik )
8th European Microwave Integrated Circuits Conference, EuMIC 2013 - Held as Part of 16th European Microwave Week, EuMW 2013; Nuremberg; Germany; 6 October 2013 through 8 October 2013 p. 372-375. (2013)
[Konferensbidrag, refereegranskat]

Distinguishing between different loss mechanisms and their distribution between different parts of the Film Bulk Acoustic Wave Resonators (FBAR) is an issue. In this work a scaling rule (based on the analysis of the loss mechanisms) is proposed for initial specification of the losses in different structural components of the tunable FBARs. Simple ADS based calibration procedure is then applied allowing for correction of these losses and identifying the lossiest component. It is shown, in the provided example that the losses due to scattering at the roughness of the top Al electrode is dominating. Polishing of Al is proposed as a possible way of scattering losses reduction.

Nyckelord: Ferroelectric; Loss acoustic; Q-factor; Scattering loss; Tunable FBAR



Denna post skapades 2013-11-01. Senast ändrad 2014-09-02.
CPL Pubid: 185991