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Fabrication of large dimension aluminum air-bridges for superconducting quantum circuits

Mohammad Abuwasib (Institutionen för mikroteknologi och nanovetenskap, Kvantkomponentfysik) ; Philip Krantz (Institutionen för mikroteknologi och nanovetenskap, Kvantkomponentfysik) ; Per Delsing (Institutionen för mikroteknologi och nanovetenskap, Kvantkomponentfysik)
Journal of Vacuum Science & Technology B (1071-1023). Vol. 31 (2013), 3, p. 031601.
[Artikel, refereegranskad vetenskaplig]

Proper grounding between different ground planes in coplanar superconducting qubit circuits is important to avoid spurious resonances which increase decoherence. Here, the authors present a possible solution to suppress such undesired modes using superconducting aluminum air-bridges which have been fabricated on top of aluminum coplanar waveguide transmission lines. 3D electromagnetic simulations were done to guide the design of the air-bridges such that the input reflection (S11) of the bridges was kept at a minimum level. A fabrication method based on optical lithography techniques was developed and it resulted in air-bridges with a height of approximately 10 μm and lengths of up to 500 μm. The method can be generalized to arbitrary length air-bridge with heights even exceeding 15 μm.

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Denna post skapades 2013-06-09. Senast ändrad 2017-10-03.
CPL Pubid: 178084


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