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Improved Tunable Performance of high Q-factor BaxSr1-xTiO3 Film Bulk Acoustic Wave Resonators

Andrei Vorobiev (Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik ) ; Spartak Gevorgian (Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik )
15th European Microwave Week - Space for Microwaves Conference Proceedings p. 1-3. (2012)
[Konferensbidrag, refereegranskat]

Improved tunable performance of high Q-factor BaxSr1-xTiO3 film bulk acoustic wave resonators (FBARs) achieved by varying Ba concentration. The Ba0.5Sr0.5TiO3 FBARs reveal tunability of series resonance frequency up to 2.4%, electromechanical coupling coefficient up to 7.5% and rather high figure of merit, Qf1300 GHz. Correlations between the measured electroacoustic parameters are analyzed using the theory of dc bias induced piezoelectric effect in paraelectric phase ferroelectrics.

Nyckelord: Ferroelectric, multiferroic, microwave film bulk acoustic resonator, tunable FBAR



Denna post skapades 2013-01-16. Senast ändrad 2015-07-03.
CPL Pubid: 171043