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Graphene Conductance Uniformity Mapping

J. D. Buron ; D. H. Petersen ; P. Boggild ; D. G. Cooke ; M. Hilke ; Jie Sun (Institutionen för mikroteknologi och nanovetenskap, Kvantkomponentfysik) ; E. Whiteway ; P. F. Nielsen ; O. Hansen ; Avgust Yurgens (Institutionen för mikroteknologi och nanovetenskap, Kvantkomponentfysik) ; P. U. Jepsen
Nano Letters (1530-6984). Vol. 12 (2012), 10, p. 5074-5081.
[Artikel, refereegranskad vetenskaplig]

We demonstrate a combination of micro four-point probe (M4PP) and non-contact terahertz time-domain spectroscopy (THz-TDS) measurements for centimeter scale quantitative mapping of the sheet conductance of large area chemical vapor deposited graphene films. Dual configuration M4PP measurements, demonstrated on graphene for the first time, provide valuable statistical insight into the influence of microscale defects on the conductance, while THz-TDS has potential as a fast, non-contact metrology method for mapping of the spatially averaged nanoscopic conductance on wafer-scale graphene with scan times of less than a minute for a 4-in. wafer. The combination of M4PP and THz-TDS conductance measurements, supported by micro Raman spectroscopy and optical imaging, reveals that the film is electrically continuous on the nanoscopic scale with microscopic defects likely originating from the transfer process, dominating the microscale conductance of the investigated graphene film.

Nyckelord: Graphene, terahertz, micro four-point probe, metrology, imaging electrical characterization, large-area graphene, layer graphene, 4-point probe, infrared-spectroscopy, epitaxial graphene, terahertz, films, optoelectronics, conductivity, electrodes



Denna post skapades 2012-11-14. Senast ändrad 2016-06-29.
CPL Pubid: 166000

 

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Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Kvantkomponentfysik

Ämnesområden

Fysik

Chalmers infrastruktur