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Microwave characterization of intrinsically tunable FBARs

Andrei Vorobiev (Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik ) ; Spartak Gevorgian (Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik )
2012 IEEE MTT-S International Microwave Symposium, IMS 2012, Montreal, 17-22 June 2012 (0149-645X).
[Konferensbidrag, refereegranskat]

Unlike the traditional piezoelectric film (AlN, ZnO etc.) based FBARs, the experimental characterization of the tunable ferroelectric FBARs typically start with low frequency DC measurements. In this work wide band microwave measurements are used to generate DC dependent analytic approximations for the parameters of the BVD model. Mason's model and curve fitting procedure is used to extract the DC bias dependent acousto-electric material parameters of the ferroelectric films.

Nyckelord: Acoustic resonator, BAW, BVD model, FBAR, Mason model, Microwave measurement



Denna post skapades 2012-10-12.
CPL Pubid: 164672

 

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