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Linear variable optical filter-based ultraviolet microspectrometer

A. Emadi ; H. W. Wu ; G. De Graaf ; Peter Enoksson (Institutionen för mikroteknologi och nanovetenskap, Bionanosystem) ; J. H. Correia ; R. Wolffenbuttel
Applied Optics (1559-128X). Vol. 51 (2012), 19, p. 4308-4315.
[Artikel, refereegranskad vetenskaplig]

An IC-compatible linear variable optical filter (LVOF) for application in the UV spectral range between 310 and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on a fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.

Nyckelord: uv, spectroscopy, resolution, roughness, mirrors, chip

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Denna post skapades 2012-09-04. Senast ändrad 2015-02-09.
CPL Pubid: 162856


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Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Bionanosystem (2007-2015)


Nanovetenskap och nanoteknik

Chalmers infrastruktur