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Design, fabrication and measurements with a UV Linear-Variable Optical Filter microspectrometer

A. Emadi ; H. Wu ; G. De Graaf ; Peter Enoksson (Institutionen för mikroteknologi och nanovetenskap, Bionanosystem) ; J.H. Correia ; R. Wolffenbuttel
Proceedings of SPIE - The International Society for Optical Engineering, Optical Sensing and Detection II, Brussels,16-19 April 2012 (0277-786X). Vol. 8439 (2012), p. Art. no. 84390V.
[Konferensbidrag, refereegranskat]

An IC-Compatible Linear-Variable Optical Filter (LVOF) for application in the UV spectral range between 310 nm and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a Xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the Mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.

Nyckelord: Linear Variable Filter, Microspectrometer, UV spectrometer

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Denna post skapades 2012-06-19. Senast ändrad 2015-02-06.
CPL Pubid: 159174


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Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Bionanosystem (2007-2015)


Nanovetenskap och nanoteknik
Elektroteknik och elektronik

Chalmers infrastruktur