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Transfer-free fabrication of suspended graphene grown by chemical vapor deposition

Niclas Lindvall (Institutionen för mikroteknologi och nanovetenskap, Kvantkomponentfysik) ; Jie Sun (Institutionen för mikroteknologi och nanovetenskap, Kvantkomponentfysik) ; Avgust Yurgens (Institutionen för mikroteknologi och nanovetenskap, Kvantkomponentfysik)
7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. NEMS 2012, Kyoto, 5 - 8 March 2012 p. 19-22. (2012)
[Konferensbidrag, refereegranskat]

Graphene, a true two-dimensional material with extraordinary mechanical- and electronic properties, is thought to be ideal for nanoelectromechanical systems (NEMS), like mass- and force sensors. Here, we present two different ways to fabricate suspended graphene for the intended use in future NEMS applications. The fabrication schemes do not require transfer of graphene from a catalyst where the graphene is grown on to another supporting substrate. The transfer is a source of several issues causing irreproducibility in large-scale production of graphene devices. We obtain suspended graphene membranes by locally removing the copper thin film on top of which the graphene is catalytically grown. The membranes are uniform and exhibit mechanical properties similar to those of exfoliated graphene. Also, suspended graphene beams with electrical interconnects are fabricated from non-catalytically grown graphene on SiO 2. Both approaches represent the first steps towards transfer-free fabrication of suspended graphene for NEMS applications.

Nyckelord: chemical vapor deposition, graphene, suspended, transfer-free


Article number 6196713



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Denna post skapades 2012-06-12. Senast ändrad 2016-06-29.
CPL Pubid: 158856

 

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