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ADS Based 1D Model of Solidly Mounted FBARs Including Longitudinal and Shear Waves

Spartak Gevorgian (Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik ) ; Andrei Vorobiev (Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik )
Integrated Ferroelectrics (1058-4587). Vol. 134 (2012), p. 75-80.
[Artikel, refereegranskad vetenskaplig]

ADS based Mason circuit model of solidly mounted FBARs is proposed where coexistence of both thickness mode longitudinal and shearwaves is assumed. While calculating the leakage of longitudinal and shear waves into the substrate via Bragg reflector the model takes into account multiple reflections from top and bottom electrodes. The results of modeling are useful in optimization of ferroelectric film deposition process and the design of the resonators.

Nyckelord: baw resonators, films



Denna post skapades 2012-06-12. Senast ändrad 2014-09-02.
CPL Pubid: 158842

 

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