CPL - Chalmers Publication Library
| Utbildning | Forskning | Styrkeområden | Om Chalmers | In English In English Ej inloggad.

Manufacturing of nanometer structures in YBa2Cu3O7 thin films using a carbon based multilayer mask

Peter Larsson (Institutionen för mikroelektronik och nanovetenskap) ; Bengt Nilsson (Institutionen för fysik) ; Huai-ren Yi (Institutionen för fysik) ; Zdravko G. Ivanov (Institutionen för fysik)
Applied Superconductivity 1995. Proceedings of EUCAS 1995, the Second European Conference on Applied Superconductivity Vol. 2 (1995), p. 935-938.
[Konferensbidrag, refereegranskat]

A process method that will produce ion milled bridges and trenches of ultra small dimensions in YBa2Cu3O7(YBCO) thin films is presented. The method is based on electron beam lithography, reactive ion etching (RIE), ion milling and a multilayer mask, which consists of an electron resist and an amorphous carbon layer with intermediate niobium. Carbon has two unique properties that are used in the process. First, carbon can easily be reactive ion etched in an oxygen atmosphere, since the oxides of carbon are gases. Furthermore, carbon has an extremely low ion milling etching rate. The electron resist pattern is transferred to the niobium and the carbon layers by a reactive ion etching process with CF4 and O2 In such a way a durable carbon mask for ion milling is formed. When the ion milling is completed, the result of the process is 50-60 nm wide bridges and 30-60 nm wide trenches in 100 nm thick YBCO films.

Nyckelord: barium compounds, electron resists, high-temperature superconductors, masks, nanostructured materials, sputter etching, superconducting thin films, yttrium compounds

Den här publikationen ingår i följande styrkeområden:

Läs mer om Chalmers styrkeområden  

Denna post skapades 2011-10-21. Senast ändrad 2011-11-02.
CPL Pubid: 147581


Institutioner (Chalmers)

Institutionen för mikroelektronik och nanovetenskap (1900-2003)
Institutionen för fysik (1900-2003)


Nanovetenskap och nanoteknik

Chalmers infrastruktur