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High-aspect-ratio, 3-D micromachining of carbon-nanotube forests by micro-electro-discharge machining in air

M. Dahmardeh ; Waqas Khalid (Institutionen för kemi- och bioteknik, Fysikalisk kemi) ; M.S. Mohamed Ali ; Y. Choi ; P. Yaghoobi ; A. Nojeh ; K. Takahata
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (1084-6999). p. 272-275. (2011)
[Konferensbidrag, övrigt]

This paper reports micro-electro-discharge machining of vertically aligned carbon nanotube forests for the formation of high-aspect-ratio, three-dimensional microstructures in the material. The developed forest machining method is a dry process performed in air, generating high-frequency pulses of electrical discharge to locally machine the nanotubes in order to create target shapes in a forest. With this approach, forest microstructures can be fabricated to have varying shapes along their height, unachievable with conventional pre-patterned chemical vapor deposition growth techniques. The use of the pulses with a minimized discharge energy defined with 35 V and 10 pF in the discharge generation circuit leads to an aspect ratio of 20 with the smallest feature of 5 μm in forests without disordering the vertical orientation of the nanotubes. Micromachining of multilayer geometries as well as arrayed needle-like microstructures with angled surfaces is demonstrated.

Denna post skapades 2011-05-31.
CPL Pubid: 141290


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Institutioner (Chalmers)

Institutionen för kemi- och bioteknik, Fysikalisk kemi (2005-2014)


Elektroteknik och elektronik

Chalmers infrastruktur