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Fabrication and characterization of IC-Compatible Linear Variable Optical Filters with application in a micro-spectrometer

A. Emadi ; H. Wu ; S. Grabarnik ; G. De Graaf ; Karin Hedsten (Institutionen för mikroteknologi och nanovetenskap, Bionanosystem) ; Peter Enoksson (Institutionen för mikroteknologi och nanovetenskap, Bionanosystem) ; J. H. Correia ; R. F. Wolffenbuttel
SENSORS AND ACTUATORS A-PHYSICAL; 23rd Eurosensors Conference Lausanne, SWITZERLAND, SEP 06-09, 2009 (0924-4247). Vol. 162 (2010), 2; Sp. Iss. SI , p. 400-405 .
[Artikel, refereegranskad vetenskaplig]

This paper reports on an IC-Compatible process for the fabrication of Linear Variable Optical Filter (LVOF). The LVOF is integrated with a detector array to result in a micro-spectrometer. The technological challenge in fabrication of an LVOF is fabrication of a well-controlled tapered cavity layer. Very small taper angles, ranging from 0.001 degrees to 0.1 degrees. are fabricated in a resist layer by just one lithography step and a subsequent reflow process. The 3D pattern of resist structures is subsequently transferred into SiO2 by an appropriate etching. Complete LVOF fabrication involves CMOS-compatible deposition of a lower dielectric mirror using a stack of dielectrics on the wafer, tapered layer formation and the deposition of the top dielectric mirror. The design principle, IC-Compatible processing and the characterization results on fabricated LVOFs are presented. (C) 2010 Elsevier B.V. All rights reserved.

Nyckelord: Linear variable filter, Micro-spectrometer, Tapered layer, Reflow, Optical filter, Thin film


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Denna post skapades 2010-11-04. Senast ändrad 2011-01-17.
CPL Pubid: 128614


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Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Bionanosystem (2007-2015)



Chalmers infrastruktur