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Tunable thin film bulk acoustic wave resonators with improved Q-factor

Andrei Vorobiev (Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik ) ; Spartak Gevorgian (Institutionen för mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik )
Applied Physics Letters (0003-6951). Vol. 96 (2010), 21, p. Article Number: 212904 .
[Artikel, refereegranskad vetenskaplig]

The tunable solidly mounted Ba0.25Sr0.75TiO3 (BSTO) thin film bulk acoustic wave resonators (TFBARs) with improved Q-factor are fabricated and characterized. The BSTO films are grown by magnetron sputtering at temperature 600 degrees C and extremely low sputter gas pressure 2 mTorr using on-axis configuration. The measured TFBARs Q-factor is more than 250 and mechanical Q-factor is more than 350 at 5 GHz resonance frequency. The improvement in the Q-factor is associated with reduction in the BSTO film grain misorientation. The latter is responsible for generation of shear waves leaking through the Bragg reflector and corresponding acoustic loss. (C) 2010 American Institute of Physics.

Nyckelord: baxsr1-xtio3



Denna post skapades 2010-06-24. Senast ändrad 2015-07-09.
CPL Pubid: 123390

 

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