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pH-sensitive properties of barium strontium titanate (BST) thin films prepared by pulsed laser deposition technique

V. V. Buniatyan ; M. H. Abouzar ; N. W. Martirosyan ; J. Schubert ; Spartak Gevorgian (Institutionen för mikroteknologi och nanovetenskap, Fysikalisk elektronik) ; M. J. Schoning ; A. Poghossian
Physica Status Solidi a-Applications and Materials Science (1862-6300). Vol. 207 (2010), 4, p. 824-830.
[Artikel, refereegranskad vetenskaplig]

pH sensitive properties of barium strontium titianate (BST) high k thin films as alternative gate material for field-effect capacitive (bio-) chemical sensors based on an electrolyte-insulator semiconductor system have been investigated. The BST films of different composition (Ba0.3Sr0.69TiO3, Ba0.25Sr0.75TiO3 and MG doped Ba0.8Sr0.2Mg0.1Ti0.9O3 were deposited by pulsed laser deposition technique from targets farbicated by self-propagating high-temperatures synthesis. The realised sensors have been electrochemically characterised by means of impedance-spectroscopy, capacitance-voltage and constant-capacitance method. The sensors possess a Nernstian-like pH sensitivity in the concentration range between pH 3 and 11 with a response time of 5-10 s. An equivalent circuit model for the BST-based capacitive field-effect sensor is discussed.(C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

Nyckelord: barium strontium titanate, PLD, biosensor, field effect sensor, FIELD-EFFECT TRANSISTORS, IDENTICAL TRANSDUCER PRINCIPLE, TUNABLE, APPLICATIONS, SENSING PROPERTIES, CHEMICAL SENSORS, MEMBRANE, DEVICES, ISFET, FABRICATION, OXIDES



Denna post skapades 2010-06-03.
CPL Pubid: 122256

 

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Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Fysikalisk elektronik (2007-2010)

Ämnesområden

Elektroteknik och elektronik

Chalmers infrastruktur