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Expanding in situ TEM instrumentation with MEMS technology

Alexandra Nafari (Extern ; Institutionen för mikroteknologi och nanovetenskap, Bionanosystem) ; Johan Angenete
Commersialization of micro and nano systems (COMS) 2009 p. 2. (2009)
[Konferensbidrag, refereegranskat]

Nanofactory Instruments is a spin off company from Chalmers University of Technology which offers instrumentation for nano-scale electrical and mechanical characterization correlated with real time imaging in situ in transmission electron microscopes (TEM). As a core component in the company’s product portfolio, proprietary MEMS sensors for quantitative force measurements on the nano-Newton and micro-Newton scales were developed. As a result of the introduction of MEMS technology into the products, added value was created and the company has now established a leading position in the market.

Nyckelord: In situ TEM, MEMS

Denna post skapades 2009-12-18.
CPL Pubid: 104244


Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Bionanosystem (2007-2015)


Övrig elektroteknik, elektronik och fotonik

Chalmers infrastruktur