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Techniques for microwave measurements of ferroelectric thin films and their associated error and limitations

P. K. Petrov ; N. McN Alford ; Spartak Gevorgian (Institutionen för mikroteknologi och nanovetenskap)
Measurement Science and Technology (09570233 ). Vol. 16 (2005), 2, p. 583-589.
[Artikel, refereegranskad vetenskaplig]

This paper examines the problem of evaluating the microwave properties of thin ferroelectric films patterned as planar capacitors. Two types of microwave measurements of ferroelectric thin films are considered: reflection- and resonance-type measurements. Algorithms are presented for evaluation of capacitance-permittivity and dielectric loss. Using sensitivity analysis, the error and limitations associated with these measurements are estimated. The end result is a series of formulae that use the network analyser's measurement data to calculate the capacitance-permittivity, the dielectric loss and the associated error.

Denna post skapades 2009-12-10.
CPL Pubid: 103231


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Institutionen för mikroteknologi och nanovetenskap



Chalmers infrastruktur