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Tunable Resonator (FBAR)

Spartak Gevorgian (Institutionen för mikroteknologi och nanovetenskap, Fysikalisk elektronik) ; T Lewin ; Harald Jacobsson ; Andrei Vorobiev (Institutionen för mikroteknologi och nanovetenskap, Fysikalisk elektronik)
(2008)
[Patentansökan]

The invention discloses a tuneable resonator (100, 200, 300, 500, 600, 700, 900) with a substrate layer (140, 260, 360, 560, 660, 960), which substrate layer supports a structure with a first electrode (130, 240, 350, 550, 650). In connection to the first electrode there is arranged a layer (120, 230, 330, 530, 630, 930) of a material which can be brought to resonate. The resonator further comprises a second electrode (110, 210, 310, 510, 610, 710, 910) arranged in connection to said material which can be brought to resonate, and the material which can be brought to resonate is a ferroelectric material. The ferroelectric material is brought into resonance by applying an electrical field (DC, AC) between the first and the second electrode, the tuning being achieved by varying the electrical field



Denna post skapades 2009-12-02. Senast ändrad 2015-02-25.
CPL Pubid: 102617

 

Institutioner (Chalmers)

Institutionen för mikroteknologi och nanovetenskap, Fysikalisk elektronik (2007-2010)

Ämnesområden

Elektroteknik och elektronik

Chalmers infrastruktur